Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection
2022
Ph.D. Thesis
mms
| Author(s): | Dogan, G. |
| Year: | 2022 |
| Department(s): | Modern Magnetic Systems |
| Bibtex Type: | Ph.D. Thesis (phdthesis) |
| Address: | Stuttgart |
| School: | Universität Stuttgart |
| DOI: | 10.18419/opus-12286 |
| Language: | eng |
| URL: | http://elib.uni-stuttgart.de/handle/11682/12303; urn:nbn:de:bsz:93-opus-ds-123032 |
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BibTex @phdthesis{escidoc:3473323,
title = {Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection},
author = {Dogan, G.},
school = {Universit{\"a}t Stuttgart},
address = {Stuttgart},
year = {2022},
doi = {10.18419/opus-12286},
url = {http://elib.uni-stuttgart.de/handle/11682/12303; urn:nbn:de:bsz:93-opus-ds-123032}
}
|
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