@article{escidoc:3257727, title = {In situ x-ray diffraction and spectro-microscopic study of ALD protected copper films}, author = {Dogan, G. and Sanli, U. T. and Hahn, K. and M{\"u}ller, L. and Gruhn, H. and Silber, C. and Sch{\"u}tz, G. and Gr\'event, C. and Keskinbora, K.}, journal = {ACS Applied Materials and Interfaces}, volume = {12}, number = {29}, pages = {33377--33385}, publisher = {American Chemical Society}, address = {Washington, DC}, year = {2020}, doi = {10.1021/acsami.0c06873} }