@article{escidoc:0224, title = {{Recent advances in use of atomic layer deposition and focused ion beams for fabrication of Fresnel zone plates for hard x-rays}}, author = {Keskinbora, K. and Robisch, A.-L. and Mayer, M. and Gr\'event, C. and Szeghalmi, A. V. and Knez, M. and Weigand, M. and Snigireva, I. and Snigirev, A. and Salditt, T. and Sch\"utz, G.}, journal = {{Proceedings of SPIE (The International Society for Optical Engineering)}}, volume = {8851}, year = {2013}, doi = {10.1117/12.2027251} }