@article{escidoc:0215, title = {{Efficient focusing of 8 keV X-rays with multilayer Fresnel zone plates fabricated by atomic layer deposition and focused ion beam milling}}, author = {Mayer, M. and Keskinbora, K. and Gr\'event, C. and Szeghalmi, A. and Knez, M. and Weigand, M. and Snigirev, A. and Snigereva, I. and Sch\"utz, G.}, journal = {{Journal of Synchrotron Radiation}}, volume = {20}, pages = {433--440}, publisher = {Published for the International Union of Crystallography by Munksgaard}, address = {Copenhagen, Denmark}, year = {2013}, doi = {10.1107/S0909049513006602} }