@article{escidoc:0013, title = {{3d nanofabrication of high-resolution multilayer Fresnel zone plates}}, author = {Sanli, U. T. and Jiao, C. and Baluktsian, M. and Gr\'event, C. and Hahn, K. and Wang, Yi and Srot, V. and Richter, G. and Bykova, I. and Weigand, M. and Sch\"utz, G. and Keskinbora, K.}, journal = {{Advanced Science}}, volume = {5}, number = {9}, publisher = {Wiley-VCH}, address = {Weinheim}, year = {2018}, doi = {10.1002/advs.201800346} }