Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing
2015
Article
mms
Author(s): | Keskinbora, K. and Grévent, C. and Hirscher, M. and Weigand, M. and Schütz, G. |
Journal: | {Advanced Optical Materials} |
Volume: | 3 |
Pages: | 792--800 |
Year: | 2015 |
Publisher: | WILEY-VCH Verlag GmbH Co. KGaA |
Department(s): | Modern Magnetic Systems |
Bibtex Type: | Article (article) |
Address: | Weinheim |
DOI: | 10.1002/adom.201400411 |
Language: | eng |
BibTex @article{escidoc:0146, title = {{Single-step 3D nanofabrication of kinoform optics via gray-scale focused ion beam lithography for efficient X-ray focusing}}, author = {Keskinbora, K. and Gr\'event, C. and Hirscher, M. and Weigand, M. and Sch\"utz, G.}, journal = {{Advanced Optical Materials}}, volume = {3}, pages = {792--800}, publisher = {WILEY-VCH Verlag GmbH Co. KGaA}, address = {Weinheim}, year = {2015}, doi = {10.1002/adom.201400411} } |